Conventional two-dimensional active microarrays have been used with success in several areas such as manipulation of biomolecules including DNA for disease detection. However, inability to process relatively 'large-volume' samples for applications like oncologic diagnostics has necessitated the introduction of a new generation of 3D microarrays with increased surface area due to their dimension in z-axis. 3D-CMEMS fabricated microarrays are packaged and have been tested by manipulating negatively charged beads (1.94µm polycarboxylate beads) in 50mM L-histidine buffer. To understand the electrochemical characterization of these microarrayed electrodes, Cyclic Voltammetry experiments have been conducted using histidine buffer solution. Further tests have been carried out under similar conditions using (a) 2D planar metal microarrays fabricated through liftoff process that have similar layout to that of 3D Carbon microarrays and (b) C-MEMS fabricated 3D Carbon microarrays for comparing their abilities in terms of electrochemical behavior. It has been confirmed through Cyclic Voltammetry experiments that C-MEMS fabricated microarrays possess wider workable window which enables efficient particle manipulation for disease detection systems and have higher current generating capacity which is required in energy storage applications.
