A novel method of scanning nano indentation system with flexure based mechanisms has been developed. Flexures are compliant structures that rely on material elasticity for their functionality and designed to produce geometrically defined motion upon application of a force. They allow highly repeatable motion without backlash or stiction associated with other motion transfer linkages. The system consists of flexure based linear motion vertical stage (Z-stage) act as mounting point for tool tip and also to measure the contact load of the tool onto sample surface, flexure based XY stage for horizontal positioning of the sample below the tool, Berkovich diamond indenter as tool tip. Application of the system to perform scratch test on material surface at fairly low loads was explored. The system was verified by performing scratch tests on aluminum and silicon samples and values were compared with literature values and found to be inline. The Current Activated Tip-Based Sintering (CATS) process was developed at San Diego State University to generate localized spark sintering effect by applying pressure and passing high levels of electric current through tip. Scratch experiments were performed on sintered Nickel specimen prepared by CATS at varying sintered depth and compared with results obtained by performing Vickers hardness tests and found be close.
